Method and apparatus for vapor deposition of diamond

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United States of America Patent

PATENT NO 5403399
SERIAL NO

07905226

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Abstract

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An apparatus for a vapor deposition of diamond by: effecting an arc discharge while feeding a discharge gas between an anode and a cathode of a thermal plasma chemical vapor deposition device; radicalizing a gaseous carbon compound by feeding the gaseous carbon compound to a generated plasma jet; and permitting said radicalized plasma jet to impinge on a substrate to be treated, whereby a film of diamond is formed on said substrate.

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Patent Owner(s)

Patent OwnerAddress
FUJITSU LIMITEDKAWASAKI-SHI KANAGAWA 211-8588

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawarada, Motonobu Atsugi, JP 11 535
Koshino, Nagaaki Yokohama, JP 21 570
Kurihara, Kazuaki Atsugi, JP 168 1898
Sasaki, Kenichi Atsugi, JP 142 1548

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