Sputter-coating target and method of use
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United States of America Patent
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Apr 4, 1995
Grant Date -
N/A
app pub date -
Aug 5, 1993
filing date -
Aug 5, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sputter coating target which alleviates the need for anode reconditioning due to a buildup of a nonconductive coating comprises a coating component which itself or its reactive product is substantially electrically nonconductive and a dopant component which itself or its reactive product is substantially electrically conductive.
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