Method of applying a monolayer lubricant to micromachines
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United States of America Patent
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Apr 4, 1995
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N/A
app pub date -
Jun 18, 1993
filing date -
Jun 18, 1993
priority date (Note) -
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Abstract
A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer from a micromachine is followed by a fluid-based hydrophilic processing of the micromachine surfaces. A lubricating monolayer surface is then formed on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means.
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