Probe apparatus with a swinging holder for an object of examination
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 4, 1995
Issued Date -
N/A
app pub date -
Jun 17, 1993
filing date -
Aug 3, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.
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