Infrared radiation sensor
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United States of America Patent
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Apr 4, 1995
Grant Date -
N/A
app pub date -
Jul 17, 1992
filing date -
Jul 19, 1991
priority date (Note) -
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Abstract
An infrared sensor comprising a sensor substrate formed of a semiconducting material and at least one set of infrared sensing portions formed one each on the opposite surfaces of said sensor substrate, wherein said infrared sensing portions are superposed one each on bride portions formed on cavities formed one each on the opposite surfaces of said sensor substrate.
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