Micromechanical transducer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 18, 1995
Grant Date -
N/A
app pub date -
Oct 30, 1992
filing date -
Oct 30, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
There is disclosed a micromechanical transducer having only one moving or movable part (1) and a stator (2), the part (1) being movable in relation to the stator and in the form of a flat member which is connected by spring arrangements, such as springs (6), to the stator. The movable part is capable of three-dimensional movement to implement a deflection.
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Family
International Classification(s)
Cited Art Landscape
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