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Abstract

A method and system for controlling a plurality of process control variables for processing discrete products is described. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process control variables; measuring the plurality of product quality parameters on a first plurality of products; exercising statistical quality control tests on the plurality of product quality parameters of the first plurality of products; continuing processing if statistical quality control tests are successful; otherwise measuring the plurality of product quality parameters on a second plurality of products; tuning the process models to create tuned process models using the plurality of product quality parameters from the second plurality of products, wherein the tuning estimates a changed state of the processing; estimating new values for the plurality of process control variables from the tuned models; processing a third plurality of products at the new values of the plurality of process control variables; measuring the plurality of product quality parameters on the third plurality of products; repeating the tuning of the process models and the estimating new values for the plurality of process control variables if the quality control parameters from the third plurality of products are not acceptable; otherwise continuing processing products with the new values of the plurality of process control variables if the quality control parameters from the third plurality of products are acceptable.

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First Claim