Method of producing micromechanical devices
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United States of America Patent
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May 2, 1995
Issued Date -
N/A
app pub date -
Sep 29, 1993
filing date -
Nov 13, 1990
priority date (Note) -
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Abstract
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. The invention disclosed here details how to do so by building the device to be passivated, cleaning the surface to be passivated, activating the surface, heating it along with the material to be used as the monolayer, exposing a vapor of the material to the surface and evacuating the excess material, leaving only the monolayer.
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