Method and apparatus for regulating a degree of reaction in a coating process
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United States of America Patent
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May 9, 1995
Grant Date -
N/A
app pub date -
Aug 25, 1993
filing date -
Aug 28, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus for controlling a ratio .gamma.=x/y, for the coating of a work piece with a layer F.sub.x G.sub.y, using plasma-enhanced reactive deposition processes, includes changing the rate at which a solid material is vaporized and also controlling the atmosphere within the vacuum chamber of the apparatus.
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