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Abstract

A gas plasma generating system includes a resonant cavity for connection to a source of very high frequency power. A plasma cavity is defined by a wall of an electrically nonconductive material positioned within the resonant cavity for containing an ionizable gas such that in use a plasma is formed in the plasma cavity, the cavity having an exit opening to enable plasma to exit from the system. The plasma cavity comprises a tubular member extending through opposed walls of the resonant cavity, the tubular member receiving at one end a plasma gas, in use, and plasma exiting from the other end, and a movable tuning member whose position can be adjusted to achieve the desired tuning condition, the tubular member defining the plasma cavity extending through the tuning member.

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First Claim