One atmosphere, uniform glow discharge plasma

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United States of America Patent

PATENT NO 5414324
SERIAL NO

08145786

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Abstract

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A steady-state, glow discharge plasma is generated at one atmosphere of pressure within the volume between a pair of insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. Space between the electrodes is occupied by air, nitrous oxide, a noble gas such as helium, neon, argon, etc. or mixtures thereof. The electrodes are charged by an impedance matching network adjusted to produce the most stable, uniform glow discharge.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITY OF TENNESSEE RESEARCH CORPORATION THE1534 WHITE AVENUE SUITE 403 KNOXVILLE TN 37996-1527

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Laroussi, Mounir Knoxville, TN 7 419
Liu, Chaoyu Knoxville, TN 4 197
Roth, John R Knoxville, TN 5 411
Spence, Paul D Knoxville, TN 9 417
Tsai, Peter P Knoxville, TN 8 591

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