Removal of perfluorocarbons from gas streams
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United States of America Patent
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May 23, 1995
Grant Date -
N/A
app pub date -
Dec 3, 1993
filing date -
Dec 3, 1993
priority date (Note) -
Expired
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Abstract
Perfluorocarbons are recovered from gas streams by subjecting the gas stream to an adsorption process in a bed of one or more energetically homogeneous adsorbents such as silicon-rich adsorbents of the FAU structure, silicon-rich adsorbents of the BEA structure, silicon-rich adsorbents of the MOR structure. The adsorption process is preferably pressure swing adsorption or temperature swing adsorption.
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