Substrate location and detection apparatus
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United States of America Patent
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May 23, 1995
Grant Date -
N/A
app pub date -
Sep 23, 1993
filing date -
Sep 23, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device for detecting and locating substrates in a cassette including a homogeneous columnar radiation source adjacent to and radiating the edges of the substrates, rod-shaped directional lenses transmitting and replicating the substrate edges in their field of view and directing the transmitted reflected radiation and image of the field of view onto sensing pixels activated to produce indications of the presence and location of the substrates in the cassette.
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