Semiconductor processor wafer holder
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jul 11, 1995
Issued Date -
N/A
app pub date -
Mar 18, 1992
filing date -
May 25, 1988
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer processor including a wafer support for holding semiconductor wafers. The wafer support member includes wafer gripping fingers mounted in receptacles formed through a wafer support plate. The fingers are angularly displaced to spread the fingers and allow loading of wafers therebetween. The fingers have central cores which are flexibly mounted within a mounting flange by a thin diaphragm. A pivot control supports the cores and carries axial loading. The pivot control members preferably are U-shaped and can serve as connections to an actuator. A locking mechanism is also shown to secure the actuator connection.
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