Modular particle monitor for vacuum process equipment
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United States of America Patent
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Jul 25, 1995
Grant Date -
N/A
app pub date -
May 13, 1993
filing date -
May 13, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus and a method provide a modular design for a particle monitor of external design used in a vacuum process equipment. In one embodiment, the key elements, i.e. laser assembly, the detection module, the beam stop and a darkened surface opposite the detection module, can be independently mounted on a pump line. The particle monitors of the present invention can be mounted on both straight sections and bends of the pump line. Each key element can be accessed independently of other key elements for repair and service.
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