High frequency crystal resonator
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United States of America Patent
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Jul 25, 1995
Issued Date -
N/A
app pub date -
May 31, 1994
filing date -
Nov 6, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A high frequency oscillator with operating frequencies of 30 MHz or greater having an etched quartz thickness shear resonator with resonating means. The resonator has a support structure and a much thinner resonating membrane cantilevered from the support structure. In a preferred embodiment, the design of the support structure is such that a sloped edge is provided between the support structure and the membrane, thus facilitating the application of electrode resonating means extending from the support structure to the membrane. In another preferred embodiment, a plurality of resonators having a support structure and cantilevered membrane with at least one sloped edge are formed on a quartz wafer in a manner similar to semiconductor chip fabrication.
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