Process of fabricating an enlongated microstructure element on a substrate
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United States of America Patent
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Aug 8, 1995
Grant Date -
N/A
app pub date -
Nov 4, 1993
filing date -
Nov 4, 1992
priority date (Note) -
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status (Latency Note)
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Abstract
The invention concerns a fabrication process of at least one generally elated structural element (14) on a substrate (12) in a first material and having a substantially flat upper face (13), said element (14) realized in a second material comprising at least a first wing (14a) parallel to a plan perpendicular to said upper face (13).
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