Method for manufacturing an ink jet head having an improved discharging port surface
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United States of America Patent
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-
Aug 22, 1995
Grant Date -
N/A
app pub date -
Oct 30, 1992
filing date -
Oct 30, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.
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