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Abstract

A process is provided for the mass-fabrication of biosensors having a permeation-restricted membrane of uniform quality. A photoresist is coated over an entire surface of a wafer on which at least two pairs of electrochemical transducer devices are arranged together with electrode(s) as many as needed. The photoresist is removed at predetermined areas by photolithography. The entire surface of the wafer is next coated with a liquid coating formulation of a crosslinkable polymer and a crosslinking agent, followed by the gelation of the coating formulation. Further, a liquid coating formulation of a crosslinkable polymer and a crosslinking agent, the coating formulation preferably containing a silicone, is coated over the entire surface of the wafer and is then caused to gel. The wafer is next treated in an organic solvent to dissolve the photoresist, so that an enzyme-free, crosslinked membrane and a permeation-restricted membrane are formed. Using an enzyme-containing liquid coating formulation of a crosslinkable polymer and a crosslinking agent, an enzyme-immobilized membrane and a permeation-restricted membrane are next formed likewise. The resulting wafer is finally cut functional unit by functional unit into chips.

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First Claim