Vertical type heat treatment system
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United States of America Patent
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-
Sep 5, 1995
Grant Date -
N/A
app pub date -
Jan 21, 1994
filing date -
Jan 21, 1993
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A vertical heat treatment system for heat treating a large number of semiconductor wafers housed in a boat at once includes a heat treatment unit having a boat loading/unloading port, a boat section communicating with the heat treatment unit through the boat loading/unloading port, an elevator mechanism for loading/unloading the boat between the boat section and the heat treatment unit through the boat loading/unloading port, a cassette section provided adjacent to the boat section, a wafer transfer mechanism for transferring wafers between a cassette and the boat, a gas supply mechanism for supplying a non-oxidization gas into the boat section, and a gas shower means for blowing the non-oxidization gas to the wafers in the vicinity of the boat loading/unloading port.
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