Polymeric coatings for micromechanical devices
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United States of America Patent
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Sep 5, 1995
Grant Date -
N/A
app pub date -
Mar 21, 1994
filing date -
Mar 21, 1994
priority date (Note) -
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Abstract
A method for reducing sticking between contacting elements in a micromechanical device is disclosed. In addition, a micromechanical device is disclosed wherein the elements of the device are less likely to stick. The method for reducing sticking in a micromechanical device (10) comprises forming a protective layer (26) on a first contact element (14) to reduce the likelihood of a first contacting element (14) sticking to another contacting element (20). The protective layer (26) may be formed of a fluoro-polymer such as Teflon-AF.
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