Mispour-misfill prevention apparatus and process
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United States of America Patent
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-
Sep 5, 1995
Grant Date -
N/A
app pub date -
Aug 24, 1992
filing date -
Aug 24, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system and a process for monitoring the supplying of a working apparatus (e.g., spray etching tool employed in the semiconductor industry) via a flow control valve from a supply container to ensure the proper chemical is delivered to said working apparatus by (1) applying an optical bar code scanning label on the supply container and either the working container or the flow control valve or both and then (2) comparing the sensings of said bar code labels with a microprocessor controller that is programmed to open the flow control valve, if the comparings show a match and to send a visual error message and a signal to leave the flow control valve closed if the comparing shows a mismatch.
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