Photon controlled decomposition of nonhydrolyzable ambients
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United States of America Patent
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Sep 19, 1995
Issued Date -
N/A
app pub date -
Mar 31, 1992
filing date -
Feb 21, 1991
priority date (Note) -
Expired
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Abstract
A method and apparatus to decompose nonhydrolyzable ambients such as chloluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.
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