MOCVD process using alkaline earth metal-heptane dionate compounds
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United States of America Patent
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Sep 19, 1995
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N/A
app pub date -
Nov 29, 1993
filing date -
Mar 18, 1991
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Expired
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Abstract
Alkaline earth metal heptane dionates which have uniform evaporation properties in a vacuum and are therefore highly suitable for use in CVD synthesis for depositing layers containing alkaline earth metal useful in fields such as the production of high temperature superconductors.
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