Micro-mechanical optical shutter
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United States of America Patent
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-
Oct 17, 1995
Grant Date -
N/A
app pub date -
Oct 29, 1993
filing date -
Oct 29, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micro-optical shutter array (92, 102) having a number of tiny shutters (10), which revolve so as to intermittently block light from a via (12), and which may be operated in either a stepping or continuous motion. The array (92, 102) may be batch manufactured using integrated circuit fabrication techniques. For each shutter, a via (12) is etched through a substrate (11). A rotor (13, 43, 53, 63) with at least one opening is fabricated over the via (12), such that as the rotor (13, 43, 53, 63) turns, radiation transmitted through the via (12) is selectively blocked or not blocked.
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