Method of manufacturing FSi(OR).sub.3

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Nov 21, 1995
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Mar 22, 1994
filing date
Mar 22, 1994

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Abstract

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By reacting Si(OR).sub.4 with HF, FSi (OR).sub.3 of high purity can be obtained easily and economically.

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Patent Owner(s)

Patent Owner	Address
TRI CHEMICAL LABORATORY INC	SAKURADAI 4002 NAKATSU AIKAWA-MACHI JAPAN AIKOH-GUN KANAGAWA 243-03

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C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Kiso, Koichi	Kanagawa, JP	1	4
Machida, Hideaki	Kanagawa, JP	31	109
Mihirogi, Katsuhiro	Kanagawa, JP	1	4
Takamatsu, Yukichi	Kanagawa, JP	21	512
Tazuke, Kiyoshi	Kanagawa, JP	1	4
Yamaguchi, Ryuichi	Kanagawa, JP	19	221

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Method of manufacturing FSi(OR).sub.3

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United States of America Patent

08215568

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SERIAL NO	08215568
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08215568

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