Importance

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Abstract

A prober tester interface system is described which includes a carriage having a plurality of cam followers on its perimeter and a cam ring having a plurality of cam grooves on its interior. Positioning means are detachably coupled to the carriage for positioning the cam followers in the cam grooves. Rotating means are coupled to the cam ring for rotating the cam ring, thereby causing the cam followers to track in the cam grooves and move the carriage in a direction substantially perpendicular to the plane of the cam ring. A method is also described in which a carriage having a probe card disposed therein and a plurality of cam followers on its perimeter is positioned in a cam ring having a plurality of cam grooves located on its interior to engage the cam followers in the cam grooves. The probe card is equipped with a plurality of test pins. The cam ring is then rotated, thereby causing the cam followers to track in the cam grooves and move the carriage in a direction perpendicular to the plane of the cam ring, thereby coupling the prober card to a test head. A semiconductor wafer is then brought into contact with the test pins and probed.

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First Claim