Method and apparatus for measuring size of particle or defect
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United States of America Patent
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-
Nov 28, 1995
Grant Date -
N/A
app pub date -
Mar 25, 1993
filing date -
Mar 27, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.
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