Multilayer nanolaminates containing polycrystalline zirconia
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United States of America Patent
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Dec 5, 1995
Grant Date -
N/A
app pub date -
Jun 27, 1994
filing date -
Jun 27, 1994
priority date (Note) -
Expired
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Abstract
Layers of zirconium oxide and another ceramic, such as alumina or silicon carbide, are sequentially deposited on a support to form a nanolaminate containing a thin layer of polycrystalline metastable tetragonal zirconia deposited on the support. A process for making a nanolaminate material of the invention is carried out by sputter deposition. Zirconia is deposited on the chosen support by vacuum sputter deposition under conditions effective to form a thin layer of polycrystalline, metastable tetragonal zirconia on the support. A hard ceramic such as alumina is then deposited on the support by vacuum sputter deposition under conditions effective to form a thin layer of hard ceramic superposed on the zirconia layer.
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