Transportable image emission microscope

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United States of America Patent

PATENT NO 5475316
SERIAL NO

08174943

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An emission microscope is mounted on a transportable structure for use on a test floor and encloses or garages an entire automatic test equipment head to facilitate high-speed testing. Test procedures allow development of static/fixed defects over time. A video mask can be developed based on emission sites on known good devices so that only emission from defect sites of bad devices under test are shown.

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Patent Owner(s)

  • HYPERVISION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Ching-Lang San Jose, CA 4 233
Hurley, Daniel T San Ramon, CA 4 188
Khurana, Neeraj Monte Sereno, CA 10 303

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