Sputtering target

United States of America Patent

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Dec 26, 1995
Grant Date
N/A
app pub date
Oct 1, 1993
filing date
Oct 1, 1993

priority date (Note)
Expired

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Abstract

Electrically conductive sputtering target comprising yttria and amorphous carbon, a method of making the same, and a method of using the same.

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Patent Owner(s)

Patent Owner	Address
MINNESOTA MINING AND MANUFACTURING COMPANY	P O BOX 33427 ST PAUL MN 55133-3427

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Hintz, Michael B	Mahtomedi, MN	29	458
Humpal, Kathleen M	Woodbury, MN	22	336
Mathers, James P	Woodbury, MN	17	660

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United States of America Patent

08130367

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Patent Longevity Expired	Forward Citations

PATENT NO	5478456
SERIAL NO	08130367
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08130367

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