Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference

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United States of America Patent

PATENT NO 5486923
SERIAL NO

08394224

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The apparatus disclosed herein employs a grating (13) which concentrates light at a preselected wavelength into the positive (33) and negative (35) first orders while minimizing the zeroth order (31). The grating (13) is illuminated with monochromatic light of the selected wavelength and a poly-phase periodic detector (25) has its sensing plane spaced from the grating a distance less than ##EQU1## where W is the width of the illuminated region of the grating. The period of the poly-phase detector is equal to P/2 so that each detector element (51) or phase responds principally to the natural interference between the positive and negative first orders without requiring magnification or redirection of the diffracted light. Preferably, the distance of the sensing plane from the grating (13) is greater than ##EQU2## so that the detector response does not include substantial components from diffraction orders higher than the first. Various embodiments of the invention are described including a wavefront compensation approach which greatly increases design freedom in the selection of grating and detector characteristics in implementing the present invention in practical and manufacturable devices.

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Patent Owner(s)

Patent OwnerAddress
GSI GROUP CORPORATION39 MANNING ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mitchell, Donald K Newton, MA 13 225
Thorburn, William G Whitinsville, MA 16 240

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