Capacitive absolute pressure measurement sensor and method of manufacturing a plurality of such sensors
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United States of America Patent
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Feb 6, 1996
Grant Date -
N/A
app pub date -
Jan 28, 1994
filing date -
Feb 12, 1993
priority date (Note) -
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Abstract
The invention relates to a capacitive absolute pressure measurement sensor having a first element (2) in which is arranged a mobile electrode (4), a second element (6) in which is arranged a fixed electrode (8) situated facing and insulated from said mobile electrode (4), a connecting frame (10) interposed between the first element and the second element to define a chamber (12) insulated from the external environment and inside of which there is substantially zero pressure, and a reference volume (14) connected to the chamber. The first element (2) has the configuration of a membrane of substantially constant thickness and the reference volume (14) is arranged at least partially in the second element (6).
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