Combined atomic force and near field scanning optical microscope with photosensitive cantilever
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United States of America Patent
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Feb 6, 1996
Grant Date -
N/A
app pub date -
Sep 20, 1994
filing date -
Sep 20, 1994
priority date (Note) -
Expired
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Abstract
A combined atomic force and near field microscope assembly for atomic level inspection of a target object. The assembly includes a scanning probe with a sharp tip and a photosensitive region on its lower surface. A sample is disposed on a glass substrate and exposed to an evanescent wave generated on the glass substrate by total internal reflection. An optical probe comprising a microfabricated cantilever having an apex in close proximity to a photosensitive region is disposed in close proximity to a sample. The photosensitive region collects light generated by FTR at the apex of the optical probe due to local disruptions of the evanescent field caused by the probe tip. A cantilever displacement mechanism is included so as to allow for operation in a second mode as a conventional atomic force microscope.
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