Teflon filled resinoid dicing blades for fabricating silicon die modules

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United States of America Patent

PATENT NO 5494698
SERIAL NO

08334978

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Abstract

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A resinoid dicing blade having approximately a 20% by volume porosity structure is coated and impregnated with Teflon.RTM. by a process which impregnates the resinoid blade with Teflon.RTM. to about 0.3 to 0.5% by weight. The Teflon.RTM. impregnated dicing blades not only reduces nozzle chipping when bonded silicon wafers are separated into a plurality of individual printhead die, but blade life is significantly increased.

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Patent Owner(s)

Patent OwnerAddress
XEROX CORPORATION45 GLOVER AVENUE P O BOX 4505 NORWALK CT 06856-4505

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Altavela, Robert P Farmington, NY 36 428
Herko, Lawrence H Walworth, NY 8 148
White, Robert M Rochester, NY 13 580

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