Method of inspecting articles

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United States of America Patent

PATENT NO 5495535
SERIAL NO

08122507

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of inspecting an article with respect to a stored list of reference features by scanning the article to detect online features, transforming their coordinates according to registration transformation parameters to correct for misregistration of the article, and comparing the transformed coordinates of the online features with those of the stored reference features for matches. According to this method, an initial estimate of the required registration transformation parameters is provided and is dynamically improved by continuously computing and periodically updating the estimate from the coordinates of the online features detected during the scanning of the article and the coordinates of the stored reference features.

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Patent Owner(s)

Patent OwnerAddress
ORBOTECH LTDISRAEL MASAO CITY YAVNE CENTRAL DISTRICT
ORBOTECH INC44 MANNING ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harel, Eyal Tel Aviv, IL 4 135
Nissim, Moshe Raanana, IL 5 168
Smilansky, Zeev Kfar Meishar, IL 37 578

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