Organic stripping composition

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United States of America Patent

PATENT NO 5496491
SERIAL NO

08446435

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Abstract

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Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 S RIVER PARKWAY TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Michelotti, Francis W Easton, PA 9 312
Ward, Irl E Bethlehem, PA 42 1072

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