Probe card system and method
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United States of America Patent
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Apr 9, 1996
Issued Date -
N/A
app pub date -
Mar 9, 1995
filing date -
Mar 20, 1992
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A semiconductor wafer probe test interface system (2) and method of operating the system. The wafer probe system includes a plurality of cassettes (302) adapted to hold wafer probe test cards (304). The cassettes are loaded into position for testing of semiconductor wafers with a transport assembly system (6). A memory device (316) on the cassette is used to store data regarding usage of the card such as number of wafer touchdowns. A smart controller (220) has the capability to 'talk' to the prober and tester.
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