Diaphragm pressure sensor including anti-stock protection means and gradiomanometer incorporating such a sensor
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United States of America Patent
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Apr 23, 1996
Grant Date -
N/A
app pub date -
May 25, 1994
filing date -
May 25, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A pressure sensor (20) comprises a deformable diaphragm (22) which closes a fluid passage (18) in sealed manner. In order to protect the diaphragm (22) from shocks, the passage includes a restriction (44) whose dimensions are so designed as to limit the pressure peak applied to the diaphragm to a cutoff value which the diaphragm can withstand. The restriction (44) may be formed in a detachable capillary tube (42) or it may be in the form of grooves in a small silicon plate integrated in the active portion of the sensor.
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