PFPE coatings for micro-mechanical devices

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United States of America Patent

PATENT NO 5512374
SERIAL NO

08239497

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Abstract

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A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhesion.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Henck, Steven A Plano, TX 17 501
Wallace, Robert M Dallas, TX 53 3247
Webb, Douglas A Chandler, AZ 24 1801

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