Treating liquid supplying apparatus for a substrate spin treating apparatus
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United States of America Patent
Stats
-
May 7, 1996
Grant Date -
N/A
app pub date -
Mar 30, 1994
filing date -
Mar 30, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A plurality of nozzles and treating liquid supplying tubes are supported by rigid support arms forming part of temperature control piping for contacting the tubes to maintain treating liquids in the tubes to a constant temperature. The support arms are pivotable about a pivot axis located sideways from a substrate, such that the nozzles are movable between a dispensing position and a standby position displaced from above the substrate. A drive arm engages and swings a selected one of the support arms to move the nozzle attached to the selected support arm, between the dispensing position and standby position. With this construction, a nozzle selected from the plurality of nozzles is reliably moved in a predetermined posture to a predetermined position, while allowing sufficient temperature control of treating liquids by the temperature controlling piping, and avoiding inadvertent dripping of the treating liquids due to deformations of the treating liquid supplying tubes.
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