Method and apparatus for detection, analysis and identification of particles
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United States of America Patent
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May 7, 1996
Grant Date -
N/A
app pub date -
Sep 1, 1994
filing date -
Sep 1, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and an apparatus for the analysis of particles contained in a material, such as particles in a fluid or on a surface, such as the surface of a semiconductor, by two orthogonally polarized, intensity and phase modulated laser beams, wherein the detected scattered light is synchronously demodulated. The apparatus comprises a laser source producing a polarized laser beam, a state of polarization modulator, and a photoreceiver for detecting light scattered by particles at an angle to the incident light. A synchronous demodulator, such as a dual channel lock-in amplifier, separates the intensity and phase modulated portions of the scattered signals. A reference unit for detecting a non-scattered light produced by the sample to provide a reference is preferably provided, as well. The size, index of refraction and identity, of the particles, for example, can be determined.
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