Transparent optical chuck incorporating optical monitoring
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United States of America Patent
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May 7, 1996
Grant Date -
N/A
app pub date -
Sep 13, 1994
filing date -
Sep 13, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A transparent chuck is used to force a semiconductor wafer to take a prescribed shape. Any gap which is formed between the chuck and the wafer can be imaged through the transparent chuck. An interferometer is used to illuminate the gap with a narrow band illumination to create interference fringes in the gap. The fringes can be electronically imaged to create a digital input to a computer. Merit functions corresponding to the total volume of fringes in the gap or to the summation of nearest neighbor slopes of such fringes provide a measure of the thickness of such gap.
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