Fluid dispensing system

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United States of America Patent

PATENT NO 5516429
SERIAL NO

08107866

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of said first pump, and accumulator/second diaphragm pump means connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farney, Michael K Irving, TX 8 514
Gibson, Gregory M Dallas, TX 27 903
Snodgrass, Ocie T Garland, TX 15 673

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