Probe apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 14, 1996
Grant Date -
N/A
app pub date -
Jul 19, 1993
filing date -
Mar 18, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe apparatus for measuring electrical characteristics of an object to be tested by putting a plurality of probes in electrical contact with the object comprises an apparatus body, a probe card having a plurality of probes, and a probe card holder for holding the probe card at a measurement position facing the object. A memory device for memorizing data for measuring the object is provided on the probe card holder.
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