Double-sided substrate cleaning apparatus
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United States of America Patent
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May 21, 1996
Grant Date -
N/A
app pub date -
Nov 4, 1994
filing date -
Nov 5, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.
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International Classification(s)
Cited Art Landscape
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