Process for measuring the inclination of boundary areas in an optical system using interferometry to extract reflections from disturbance-generating boundary areas
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United States of America Patent
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May 21, 1996
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N/A
app pub date -
Mar 23, 1994
filing date -
Oct 31, 1991
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Abstract
The description relates to the measurement of the inclination of boundary areas in an optical system and a device for implementing the process. Starting with an auto-collimation process which determines the inclination of this boundary area in relation to a reference axis from the deviation of a light beam collimated onto the boundary area to be investigated and reflected on a position-sensitive photodetection system, a twin-beam interferometer process with downstream evaluation electronics is provided which permits the separation of the interferogram, intensity-modulated according to the invention, of the boundary area to be investigated from the unmodulated disturbance reflections of those not to be investigated as far as the interferogram intensities in the photon-noise range and thus offers a resolution in the deviation of the center of gravity of the interferogram of the order of 10 nm. To modulate the intensity of the interferogram, the difference in the optical distance between the reference and test beams to the boundary area to be investigated is time-modulated.
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