Wafer holding apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 28, 1996
Issued Date -
N/A
app pub date -
May 15, 1995
filing date -
Jan 25, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer holding apparatus comprises a susceptor unit having wafer support grooves where wafers are detachably fixed, a plurality of chuck claws so provided as to be movable by air cylinders relative to a chuck body and adapted to hold the outer edge of the wafer, a transfer arm for transferring the chuck body to a predetermined position, and an automatic position correcting device for automatically correcting the positions of the chucks relative to the wafer support groove.
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Cited Art Landscape
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