Thermal processing apparatus with heat shielding member
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United States of America Patent
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May 28, 1996
Grant Date -
N/A
app pub date -
Mar 1, 1994
filing date -
Mar 3, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A heat shielding member is provided on an object-to-be-processed holder for loading/unloading an object to be processed to/from a thermal processing position. The heat shielding member can cover a space below the processing position. As a result, leakage of radiation heat from the processing position can be blocked, and an optimum temperature gradient at the processing position can be maintained. Accordingly the entire surface of the object to be processed can be efficiently thermally processed at uniform temperatures, and throughputs in the fabrication steps can be improved.
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