Self-assembled monolayer coating for micro-mechanical devices
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United States of America Patent
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Jun 4, 1996
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N/A
app pub date -
Jun 30, 1994
filing date -
Jun 30, 1994
priority date (Note) -
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Abstract
A method of forming of a monomolecular coating (19) for surfaces of contacting elements (11, 17) of micro-mechanical devices (10), specifically, devices that have moving elements that contact other elements and that tend to stick as a result of the contact. The method uses liquid deposition, with the device being placed in a solution that contains a precursor to the formation of the coating. The precursor is chosen based on coordination chemistry between the precursor and the surface to be coated.
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